Over-range behavior of sealed-cavity polysilicon pressure sensors

This publication has 5 references indexed in Scilit:

• Fracture strain of LPCVD polysilicon
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
• Residual stress and mechanical properties of boron-doped p+-silicon films
  Sensors and Actuators A: Physical, 1990
• Single-crysytal silicon pressure sensors with 500 × overpressure protection
  Sensors and Actuators A: Physical, 1990
• An ultraminiature solid-state pressure sensor for a cardiovascular catheter
  IEEE Transactions on Electron Devices, 1988
• Silicon as a mechanical material
  Proceedings of the IEEE, 1982