Improved atomic force microscope using a laser diode interferometer
- 1 August 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (8) , 3905-3908
- https://doi.org/10.1063/1.1143289
Abstract
The performance of an atomic force microscope using a laser diode interferometer has been improved to the point where its resolution is comparable to that of laser beam deflection systems. We describe the structure of this microscope, present a model that takes into account the main parameters associated with its operation, and demonstrate its sensitivity by showing images of a small area scan with atomic resolution as well as a large area scan in a stand‐alone configuration.Keywords
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