A non-mass-analyzed solar cell ion implanter
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1) , 94-99
- https://doi.org/10.1016/0168-583x(85)90615-9
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- New ion implant technique for low-cost solar cell fabricationReview of Scientific Instruments, 1981
- A study of the factors which control the efficiency of ion-implanted silicon solar cellsIEEE Transactions on Electron Devices, 1980
- Intense ion beamsReports on Progress in Physics, 1974
- The technology and chemistry of heavy ion sourcesNuclear Instruments and Methods, 1973