Abstract
Using a simple model to take into account the backscattering effects of interfaces we have developed a scheme which removes the necessity for time-consuming Monte Carlo calculations in the generation of positron stopping profiles in multilayer systems. This scheme uses tabulated mean depth and backscattering fraction data for positrons in the materials constituting the multilayer and represents a computation time saving of several orders of magnitude. This makes detailed multilayer defect profiling with positrons a practical possibility.