Nonevaporable getter films for ultrahigh vacuum applications
- 1 January 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (1) , 148-154
- https://doi.org/10.1116/1.580963
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Pumping characteristics of the St707 nonevaporable getter (Zr 70 V 24.6-Fe 5.4 wt %)Journal of Vacuum Science & Technology A, 1996
- Ultimate pressures of the large electron positron collider (LEP) vacuum systemVacuum, 1993
- Obtention of pressures in the 10−14 torr range by means of a ZrVFe non evaporable getterVacuum, 1993
- Outgassing properties and structure of TiN films on stainless steel substratesVacuum, 1992
- A new model of surface precipitation of boron nitride on an austenitic stainless steel and its outgassing natureThin Solid Films, 1989
- A new pumping approach for the large electron positron collider (LEP)Nuclear Instruments and Methods in Physics Research, 1983
- A nonevaporable low temperature activatable getter materialJournal of Vacuum Science and Technology, 1981
- Titanium nitride film as a protective coating for a vacuum deposition chamberThin Solid Films, 1979
- Surface segregation of boron in nitrogen-strengthened stainless steelJournal of Vacuum Science and Technology, 1979
- Monte Carlo computations on molecular flow in pumping speed test domesVacuum, 1967