A compact electron-beam metal vapour source with integral cooling and shutter
- 1 October 1987
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 20 (10) , 1288-1289
- https://doi.org/10.1088/0022-3735/20/10/033
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- A platinum evaporation source for molecular beam epitaxy applicationsJournal of Vacuum Science & Technology A, 1986
- Electron-gun evaporators of refractory metals compatible with molecular beam epitaxyJournal of Vacuum Science & Technology A, 1985
- A UHV compatible and miniaturized evaporator used as a controlled source of high melting point metal vaporJournal of Vacuum Science & Technology A, 1984
- A survey of techniques for the vacuum deposition of thin metallic filmsVacuum, 1968