Growth and Resistivity Characteristics of Undoped Semi-Insulating GaAs Crystals with Low Dislocation Density

Abstract
Remarkably low dislocation density of approximately 1000/cm2 (minimum 600/cm2) and uniform distribution were attained in two inch diameter undoped GaAs single crystals grown by an improved LEC technique. Resistivity was revealed to be high enough (1×108 Ω·cm) and homogeneity was remarkably improved over that of conventional high dislocation density LEC crystal.