Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers
- 1 May 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (3) , 1064-1069
- https://doi.org/10.1116/1.1576397
Abstract
Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm2. Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm2. Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates.Keywords
This publication has 18 references indexed in Scilit:
- Monolithic integration of room-temperature cw GaAs/AlGaAs lasers on Si substrates via relaxed graded GeSi buffer layersJournal of Applied Physics, 2003
- Strategies For Direct Monolithic Integration of AlxGa(1−x)As/InxGa(1−x)As LEDS and Lasers On Ge/GeSi/Si Substrates Via Relaxed Graded GexSi(1−x) Buffer LayersMRS Proceedings, 2001
- Modeling and Experimental Analysis of the Material Removal Rate in the Chemical Mechanical Planarization of Dielectric Films and Bare Silicon WafersJournal of the Electrochemical Society, 2001
- Analysis of dark-line defect growth suppression in InxGa1−xAs/GaAs strained heterostructuresJournal of Applied Physics, 1997
- GeSi/Si NanostructuresAnnual Review of Materials Science, 1995
- High performance InGaAsP/InP lasers on Si substratesElectronics Letters, 1994
- Optical and electrical degradations of GaAs-based laser diodes grown on Si substratesApplied Physics Letters, 1994
- Reliability of GaAs-based semiconductor diode lasers: 0.6-1.1 mu mIEEE Journal of Quantum Electronics, 1993
- Surface morphology of related GexSi1−x filmsApplied Physics Letters, 1992
- GaAs on Si and related systems: Problems and prospectsJournal of Crystal Growth, 1989