Sputtering of molecules and clusters
- 1 June 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 27 (1) , 173-180
- https://doi.org/10.1016/0168-583x(87)90018-8
Abstract
No abstract availableKeywords
This publication has 34 references indexed in Scilit:
- Rotational, Vibrational and Translational Energy Distributions of Sputtered S 2 MoleculesEurophysics Letters, 1986
- Plasma-assisted etching mechanisms: The implications of reaction probability and halogen coverageJournal of Vacuum Science & Technology B, 1985
- Plasma-assisted etching: Ion-assisted surface chemistryApplied Surface Science, 1985
- Etch products from the reaction on Cl2 with Al(100) and Cu(100) and XeF2 with W(111) and NbJournal of Vacuum Science & Technology B, 1985
- Ion-induced molecular ejection from D2O iceSurface Science, 1984
- Emission of large hydrocarbons from frozen CH4 by keV proton irradiationNature, 1984
- The mechanisms of sputtering part I.Radiation Effects, 1984
- Sputtering of Van der Waals moleculesPhysics Letters A, 1981
- The sputtering processes during 6 kev Xe ion beam bombardment of halidesRadiation Effects, 1978
- On the energy distribution of sputtered clustersRadiation Effects, 1975