Analyses of Plasma Flux and Density Distribution in Plasma Sources Surrounded by Magnetic Multipole Fields

Publisher Website
Google Scholar
Abstract
Plasma confinement characteristics of plasma sources, the side walls of which are surrounded by magnetic multipole fields, are analyzed using theoretical equations. Experimental data used are those obtained with microwave plasma sources. The plasma flux, the pressure range over which a uniform plasma is produced, the plasma density distribution at a plasma grid and the cusp leak width are discussed. If the leak width is the geometric mean value of the ion and electron Larmor diameters, the results estimated using the theoretical equations are consistent with the experimental ones. It has also been observed from the traces due to the plasma irradiation that the leak width corresponds to the geometric mean value. The validity of the equations has been confirmed. These equations can be used as a basis for the design of a plasma source capable of producing a uniform high-density plasma over a wide area.