An algorithm for analyzing ellipsometric data taken with multiple angles of incidence
- 1 December 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 290-291, 51-56
- https://doi.org/10.1016/s0040-6090(96)09186-9
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Numerical techniques useful in the practice of ellipsometryThin Solid Films, 1995
- Numerical ellipsometry: enhancement of new algorithm for real-time, in situ film growth monitoringThin Solid Films, 1994