Materials issues in microelectromechanical systems (MEMS)
Top Cited Papers
- 1 January 2000
- journal article
- Published by Elsevier in Acta Materialia
- Vol. 48 (1) , 179-196
- https://doi.org/10.1016/s1359-6454(99)00294-3
Abstract
No abstract availableKeywords
This publication has 73 references indexed in Scilit:
- Control tribological and mechanical properties of MEMS surfaces. Part 1: critical reviewMicrosystem Technologies, 1999
- Polymer materials for microsystem technologiesMicrosystem Technologies, 1998
- PECVD silicon carbide as a chemically resistant material for micromachined transducersSensors and Actuators A: Physical, 1998
- Microfabricated electrostatic actuators for hard disk drivesIEEE/ASME Transactions on Mechatronics, 1998
- Fabrication of diffractive optical elements using a single optical exposure with a gray level maskJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- The thermomechanical integrity of thin films and multilayersActa Metallurgica et Materialia, 1995
- A new procedure for measuring the decohesion energy for thin ductile films on substratesJournal of Materials Research, 1994
- Wafer bonding: SOI, generalized bonding, and new structuresMicroelectronic Engineering, 1993
- The case for magnetically driven microactuatorsSensors and Actuators A: Physical, 1992
- Analysis of Critical Debonding Pressures of Stressed Thin Films in the Blister TestThe Journal of Adhesion, 1988