A new residual stress measurement method using ultra-wide micromachined bilayer cantilevers
- 9 January 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (4) , 490-496
- https://doi.org/10.1088/0960-1317/14/4/008
Abstract
No abstract availableKeywords
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