Effect of sputtering on the strength of silicate glasses
- 1 July 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (7) , 2972-2974
- https://doi.org/10.1063/1.323037
Abstract
Biaxial tensile strengths of radio frequency and ion-beam sputtered silicate glass disks were ≳100% over as-received polished disks. Fracture surface analysis, correlated with the fracture stress, showed failure to originate within the depressions formed from sputtering. Thus sputtering itself limits the increased strength of silicate glasses initially obtained by sputtering away the surface layer containing mechanically introduced flaws.This publication has 18 references indexed in Scilit:
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