Surface relief of crystalline quartz etched in a planar plasma reactor
- 1 August 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 106 (3) , 137-144
- https://doi.org/10.1016/0040-6090(83)90474-1
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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