Characterization of tantalum oxynitride thin films as high-temperature strain gauges
- 28 February 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 218-221
- https://doi.org/10.1016/0924-4247(94)00893-m
Abstract
No abstract availableKeywords
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