Cross sections for 16O(He,He)16O resonant elastic scattering and application to elemental analysis of YBa2Cu4O8 and Nd1+xBa2−xCu3O7−δ films grown on SrTiO3
- 1 January 1996
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 79 (1) , 14-20
- https://doi.org/10.1063/1.360948
Abstract
The differential cross sections for 16O(He,He)16O resonant elastic scattering at 3.034 and 3.078 MeV have been measured using stoichiometric thin (100 Å) and thick (6000 Å) SiO2 layers formed on Si(100) wafers by thermal oxidation at 900 °C under H2 and O2 flows. We have determined the resonance widths (Γ) and interaction radii (a), which are the parameters defining the cross sections in the partial wave analysis, by best fitting the angular and energy dependent scattering yields from oxygen. A computer simulation program for Rutherford backscattering including the 16O(He,He)16O resonant scattering has been synthesized and applied to the elemental analysis of thin YBa2Cu4O8 and Nd1+xBa2−xCu3O7−δ films grown on SrTiO3 substrates. The present elemental analysis is compared with the transition temperatures of superconductivity (Tc) in the context of the oxygen deficiency. The accuracy of oxygen content is estimated to be better than 0.1 (a few %). How to improve the accuracies of the elemental analysis, in particular the oxygen content, is discussed in detail.This publication has 18 references indexed in Scilit:
- Oxygen content and disorder of a-axis YBaCuO films with very high crystallinity studied by resonant Rutherford backscatteringPhysica C: Superconductivity and its Applications, 1995
- Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa2Cu3Ox Thin Films Using 16O(α, α)16O 3.045 MeV Resonance ReactionJapanese Journal of Applied Physics, 1994
- Peculiarities of the 16O(α, α)16O 3.045 Me V resonance scattering and its application to investigation of oxygen in siliconNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Absolute calibration of the 16O(α,α)16O elastic scattering resonance at 7.30–7.65 MeV and applications to oxygen depth profilingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Cross sections for 170.5° backscattering of 4He from oxygen for 4He energies between 1.8 and 5.0 MeVNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Channeling analysis of intrinsic and radiation-induced disorder in single crystalline high-Tc YBa2Cu3O7 thin filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- The use of the 3.05 MeV oxygen resonance for 4He backscattering near-surface analysis of oxygen-containing high Z compoundsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Study of radiation damage in an ion implanted rare-earth iron garnet crystalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Elastic Scattering of Alpha-Particles by OxygenPhysical Review B, 1953
- Coulomb Functions for Reactions of Protons and Alpha-Particles with the Lighter NucleiReviews of Modern Physics, 1951