Pyrolytic Deposition of Carbon Films Containing Nitrogen and/or Boron
- 1 July 1990
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 73 (7) , 1912-1916
- https://doi.org/10.1111/j.1151-2916.1990.tb05244.x
Abstract
Carbon films containing nitrogen and/or boron were prepared in a closed system by the pyrolysis of appropriate precursor materials. The decomposition products of the pyrolysis were identified and the resulting films were characterized by chemical and physical means. The electrical conductivity of the heteroatom‐containing films is similar to that of pure amorphous carbon films. Boron nitride was present in the C‐N‐B film as revealed by XPS and IR spectroscopy. Oxygen appeared to have a role in the adherence of the films to the silica substrate.Keywords
This publication has 10 references indexed in Scilit:
- Aminoborane Polymers as Precursors of C‐N‐B Ceramic MaterialsJournal of the American Ceramic Society, 1988
- Semiconducting Amorphous Film Containing Carbon Nitrogen and BoronJournal of the Electrochemical Society, 1988
- Boron-carbon-nitrogen materials of graphite-like structureMaterials Research Bulletin, 1987
- INFRARED SPECTRA OF INORGANIC COMPOUNDSPublished by Elsevier ,1971
- Raman Spectrum of GraphiteThe Journal of Chemical Physics, 1970
- Core-electron binding energies for compounds of boron, carbon, and chromiumInorganic Chemistry, 1970
- Nitrogen ls electron binding energies. Correlations with molecular orbital calculated nitrogen chargesInorganic Chemistry, 1969
- Thermodynamische Betrachtungen zur Kohlenstoffabscheidung bei der pyrolyse Gasförmiger KohlenstoffverbindungenCarbon, 1967
- Bor–Stickstoff‐Verbindungen. XVIII. Die Reaktionen von α,ω‐Diaminen mit AminoboranenZeitschrift für anorganische und allgemeine Chemie, 1965
- Pyrolysis of Aromatics and Related HeterocyclicsIndustrial & Engineering Chemistry, 1958