Discharge voltage measurements during magnetron sputtering
- 1 April 2006
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 200 (14-15) , 4329-4338
- https://doi.org/10.1016/j.surfcoat.2005.02.166
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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