Realization and performance of thin SiO2/SiNx membrane for microheater applications
- 1 January 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 64 (3) , 241-245
- https://doi.org/10.1016/s0924-4247(97)01627-0
Abstract
No abstract availableKeywords
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