Etching effects to PZT capacitors with RuOx/Pt electrode by using inductively coupled plasma
- 1 April 1997
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 16 (1-4) , 149-157
- https://doi.org/10.1080/10584589708013036
Abstract
No abstract availableKeywords
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