Custom IC repairs using focused ion beams
- 31 December 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 6 (1-4) , 605-610
- https://doi.org/10.1016/0167-9317(87)90094-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Focused ion beam technology and applicationsJournal of Vacuum Science & Technology B, 1987
- Focused ion beam millingVacuum, 1986
- Integrated circuit repair using focused ion beam millingJournal of Vacuum Science & Technology B, 1986
- Abstract: Intense field-emission ion source of liquid metalsJournal of Vacuum Science and Technology, 1975