Adsorption of Hydrogen on Silicon
- 1 June 1959
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 30 (6) , 1568-1576
- https://doi.org/10.1063/1.1730240
Abstract
The adsorption of both atomic and molecular hydrogen on siliconfilms and single crystals has been studied. The kinetics of the processes as a function of coverage and gas pressure are discussed, and it is shown that in the case of adsorption of atoms, two types of adsorbed species exist. Data obtained for the areas of siliconfilms as a function of the number of silicon atoms evaporated are in good agreement with previous work.Keywords
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