Formation of indium-tin oxide (ITO) films by the dynamic mixing method
- 1 July 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 59-60, 264-267
- https://doi.org/10.1016/0168-583x(91)95219-4
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Coating film formation by dynamic mixing methodVacuum, 1989
- A new machine for film formation by ion and vapour depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Semiconducting transparent thin films: their properties and applicationsJournal of Materials Science, 1984
- Properties of tin doped indium oxide thin films prepared by magnetron sputteringJournal of Applied Physics, 1983
- Transparent conductors—A status reviewThin Solid Films, 1983
- Heat mirror coatings for energy conserving windowsSolar Energy Materials, 1981
- Preparation of conducting and transparent thin films of tin-doped indium oxide by magnetron sputteringApplied Physics Letters, 1980
- Properties of Sn-Doped Indium Oxide Prepared by High Rate and Low Temperature RF SputteringJapanese Journal of Applied Physics, 1978