Preparation of polycrystalline silicon coatings from trichlorosilane
- 1 October 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 96 (2) , 163-167
- https://doi.org/10.1016/0040-6090(82)90616-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- The dependence of coating in inductive R.F. plasmas on gas flow velocity, pressure and R.F. powerThin Solid Films, 1980
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