Influence of annealing treatment on the ferroelectric and piezoelectric properties of PZT thin films grown on silicon substrates by sputtering
- 24 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 503-506
- https://doi.org/10.1109/isaf.1996.602799
Abstract
No abstract availableKeywords
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