High Resolution Investigation of the Rod-Shaped Scattering from a (111) Si Surface by a Synchrotron Radiation Source
- 1 December 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (12A) , L2026
- https://doi.org/10.1143/jjap.26.l2026
Abstract
By using a high resolution X-ray spectrometer in conjunction with a synchrotron radiation source, the rod-shaped scattering due to crystal truncation (RSCT), which is elongated along the normal of a crystal surface through a Bragg point, was investigated for two (111) silicon wafers of which the surfaces were differently processed. It is shown that the characterization of a crystal surface, on the basis of surface roughness on an atomic scale and the misorientation of mosaic blocks, is really possible by the precise measurement of the RSCT.Keywords
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