Fast Deposition of μc-Si:H by Restrictive Dilution and Enhanced HF-Power
- 1 October 1997
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 163 (2) , R9-R10
- https://doi.org/10.1002/1521-396x(199710)163:2<r9::aid-pssa99999>3.0.co;2-7
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVDMRS Proceedings, 1995
- Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasmaJournal of Non-Crystalline Solids, 1983