Optical MEMS devices based on moving waveguides
- 7 August 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 8 (1) , 155-162
- https://doi.org/10.1109/2944.991411
Abstract
The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and optical scanner.Keywords
This publication has 11 references indexed in Scilit:
- Digital Light Processing and MEMS: an overviewPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Performance evaluation of micromachined mirror arrays for adaptive opticsPublished by SPIE-Intl Soc Optical Eng ,2000
- Bottlenecks of opto-MEMSPublished by SPIE-Intl Soc Optical Eng ,2000
- Reflective duplexer based on silicon micromechanics for fiber-optic communicationJournal of Lightwave Technology, 1999
- Micro-opto-mechanical vibration sensor integrated on siliconJournal of Lightwave Technology, 1999
- Microelectromechanical tunable filter with stablehalf symmetric cavityElectronics Letters, 1998
- Development of Prototype Micromechanical Optical Switch.JSME International Journal Series C, 1998
- Silicon-on-insulator (SOI) movable integrated optical waveguide technologySensors and Actuators A: Physical, 1996
- Fabrication of a mechanical antireflection switch for fiber-to-the-home systemsJournal of Microelectromechanical Systems, 1996
- Optical pressure sensor based on a Mach-Zehnder interferometer integrated with a lateral a-Si:H p-i-n photodiodeIEEE Photonics Technology Letters, 1993