Short-range order in ultrathin film titanium dioxide studied by Raman spectroscopy
- 28 February 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (9) , 1107-1109
- https://doi.org/10.1063/1.125953
Abstract
It is demonstrated here that nonresonant Raman spectroscopy can be used for unequivocal determination of short-range order in ultrathin films, using different structures of titanium dioxide as the model system. Titania films as thin as 7 nm sputter deposited on 〈111〉 Si have been analyzed and their phase content determined.Keywords
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