Two-dimensional phase separation in epitaxial layers
- 15 March 1992
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 45 (12) , 6614-6622
- https://doi.org/10.1103/physrevb.45.6614
Abstract
Microstructures of lattice-matched epitaxial layers, grown on (001), (110), (111, and (123) InP substrates by use of liquid-phase epitaxy, have been examined in detail by transmission electron microscopy. Results indicate that the fine-scale speckle microstructure is caused by two-dimensional phase separation occurring at the surface while the layer is growing; decomposition along the growth direction is not observed in either of the four cases examined. The decomposition is found to take place along those directions in the growth plane along which the elastic work associated with the transformation is a minimum. The temperature dependence of the wavelength of the fine-scale structure in (001) As epitaxial layers grown by use of molecular-beam epitaxy indicates that the wavelength evolution is controlled by the surface diffusion of As atoms.
Keywords
This publication has 31 references indexed in Scilit:
- Generation of strong composition-modulated structures and absence of ordered structures in InGaP crystals grown on (110) GaAs substrates by metalorganic chemical vapor depositionApplied Physics Letters, 1989
- Long-range order in InxGa1−xAsApplied Physics Letters, 1987
- Atomic ordering in As and alloy semiconductorsPhysical Review Letters, 1987
- Ordered structures in GaAs0.5Sb0.5 alloys grown by organometallic vapor phase epitaxyApplied Physics Letters, 1986
- Surface layer spinodal decomposition in In1−xGaxAsyP1−y and In1−xGaxAs grown by hydride transport vapor-phase epitaxyJournal of Applied Physics, 1985
- Transmission electron microscope and transmission electron diffraction observations of alloy clustering in liquid-phase epitaxial (001) GaInAsP layersJournal of Applied Physics, 1985
- On elastic relaxation and long wavelength microstructures in spinodally decomposed InxGa1−x.AsyP1−yepitaxial layersPhilosophical Magazine A, 1985
- Long-Range Order inPhysical Review Letters, 1985
- Spinodal decomposition in InGaAsP epitaxial layersJournal of Crystal Growth, 1984
- Composition modulation in liquid phase epitaxial InxGa1−xAsyP1−y layers lattice matched to InP substratesApplied Physics Letters, 1982