Deposition of thin films by uv light laser ablation
- 1 January 1997
- journal article
- Published by SAGE Publications in Surface Engineering
- Vol. 13 (1) , 71-74
- https://doi.org/10.1179/sur.1997.13.1.71
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Pb-based ferroelectric thin film actuator for optical applicationsMicrosystem Technologies, 1995
- Preparation of Pb(Zr, Ti)O3 Films on Si Substrate by Laser AblationJapanese Journal of Applied Physics, 1992
- Preparation of Oxide Thin Films by Laser AblationJapanese Journal of Applied Physics, 1992
- Crystal structure and superconductivity of (La,Sr)2CuO4/Sm2CuO4 superlattices prepared by excimer laser depositionApplied Physics Letters, 1991
- Ceramic film preparation by high power cw CO2 laser evaporation.Journal of the Japan Society for Precision Engineering, 1987