Synergy of Electronic Excitations and Elastic Collision Spikes in Sputtering of Heavy Metal Oxides
- 11 May 1998
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 80 (19) , 4325-4328
- https://doi.org/10.1103/physrevlett.80.4325
Abstract
The emission of secondary ions and neutrals from uranium oxide has been measured for impact of highly charged, heavy ions. Total ablation rates and secondary ion yields increase strongly with projectile charge. The dependencies on projectile charge , impact energy , and projectile mass of secondary ion yields demonstrate the presence of an interaction regime where electronic excitation by charge neutralization and elastic collision spikes combine synergistically.
Keywords
This publication has 22 references indexed in Scilit:
- Potential Sputtering of Cleanby Slow Highly Charged IonsPhysical Review Letters, 1997
- Electronic Sputtering and Desorption Effects in TOF-SIMS Studies Using Slow Highly Charged Ions like Au69+Materials Science Forum, 1997
- Emission of secondary particles from metals and insulators at impact of slow highly charged ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Electronic Sputtering of Thin Conductors by Neutralization of Slow Highly Charged IonsPhysical Review Letters, 1997
- Sputter yields of insulators bombarded with hyperthermal multiply charged ionsPhysica Scripta, 1997
- Potential Sputtering of Lithium Fluoride by Slow Multicharged IonsPhysical Review Letters, 1995
- Secondary ion emission from lithium fluoride under impact of slow multicharged ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- The energy dependence of gold selfsputteringNuclear Instruments and Methods, 1976
- Erratum: Energy density and time constant of heavy-ion-induced elastic-collision spikes in solidsApplied Physics Letters, 1975
- Energy density and time constant of heavy-ion-induced elastic-collision spikes in solidsApplied Physics Letters, 1974