Ellipsometric data processing: an efficient method and an analysis of the relative errors
- 15 October 1985
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 24 (20) , 3368-3373
- https://doi.org/10.1364/ao.24.003368
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 4 references indexed in Scilit:
- Method for numerical inversion of the ellipsometry equation for transparent filmsJournal of the Optical Society of America, 1983
- Multiple angle ellipsometric analysis of surface layers and surface layer contaminantsApplied Optics, 1982
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972