Modelling and measurement of surface impurity profiles of laterally diffused regions
- 1 August 1978
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 13 (4) , 455-461
- https://doi.org/10.1109/jssc.1978.1051076
Abstract
No abstract availableKeywords
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