Accurate control of evaporated multilayer thicknesses by a standard quartz monitoring system
- 1 December 1991
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 62 (12) , 2984-2987
- https://doi.org/10.1063/1.1142512
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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