Epitaxial Growth of Ti1- xAl xN Buffer Layer for a Ferroelectric (Ba, Sr)TiO3 Capacitor on Si Substrate
- 1 February 1998
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 37 (2A) , L151
- https://doi.org/10.1143/jjap.37.l151
Abstract
Epitaxial titanium aluminum nitride, Ti1-x Al x N(100) (0≦x2 + ion beam irradiation with 100 eV energy and Ti and Al simultaneous evaporation. The epitaxial relationship was confirmed to be Ti1-x Al x N(100)//Si(100), Ti1-x Al x N//Si by X-ray diffraction (XRD) and in situ reflection high-energy electron diffraction (RHEED). Although the electrical resistivity increased exponentially with x, the values remained on the order of 10-4 Ω·cm. Using the Ti1-x Al x N buffer layer, we have successfully fabricated a capacitor with an epitaxial (Ba, Sr)TiO3 film on a Si substrate.Keywords
This publication has 11 references indexed in Scilit:
- Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputteringPublished by Elsevier ,2002
- Growth and mechanical anisotropy of TiN thin filmsThin Solid Films, 1995
- Heteroepitaxial TiN Film Growth on Si(111) by Low Energy Reactive Ion Beam EpitaxyJapanese Journal of Applied Physics, 1995
- High-temperature oxidation of ion-plated TiN and TiAlN filmsJournal of Materials Research, 1993
- Epitaxial growth of TiN films on (100) silicon substrates by laser physical vapor depositionApplied Physics Letters, 1992
- Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating methodThin Solid Films, 1991
- Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanismsJournal of Applied Physics, 1990
- Oxidation kinetics of TiN thin filmsJournal of Applied Physics, 1981
- Diffusivity and solubility of oxygen in platinum and Pt-Ni alloysMetallurgical Transactions, 1972
- Diffusion of Oxygen through a Platinum DiaphragmJournal of the Electrochemical Society, 1969