Computer-simulated explosion of poly-silicide links in laser-programmable redundancy for VLSI memory repair
- 1 November 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 36 (11) , 2433-2439
- https://doi.org/10.1109/16.43663
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Explosion of poly-silicide links in laser programmable redundancy for VLSI memory repairIEEE Transactions on Electron Devices, 1989
- Computer simulation of target link explosion in laser programmable redundancy for silicon memoryJournal of Materials Research, 1986
- Laser programmable redundancy and yield improvement in a 64K DRAMIEEE Journal of Solid-State Circuits, 1981
- Laser annealing under the oxide layers in siliconApplied Physics Letters, 1980