Integrated optical ring resonator with micromechanical diaphragms for pressure sensing
- 1 May 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 6 (5) , 671-673
- https://doi.org/10.1109/68.285575
Abstract
An optical pressure sensor has been fabricated which uses an integrated-optical ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. This pressure sensor is rugged, is amenable to batch fabrication, and it provides a link-insensitive readout.<>Keywords
This publication has 10 references indexed in Scilit:
- Optical pressure sensor based on a Mach-Zehnder interferometer integrated with a lateral a-Si:H p-i-n photodiodeIEEE Photonics Technology Letters, 1993
- Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguidePublished by SPIE-Intl Soc Optical Eng ,1993
- Integrated optical sensors using micromechanical bridges and cantileversPublished by SPIE-Intl Soc Optical Eng ,1993
- Low-pressure chemical vapor deposition silicon–oxynitride films for integrated opticsApplied Optics, 1992
- Integrated optic pressure sensor on silicon substrateApplied Optics, 1989
- Optical Fiber Point Temperature SensorPublished by SPIE-Intl Soc Optical Eng ,1988
- Theory of Optical WaveguidesPublished by Springer Nature ,1988
- Pseudoheterodyne detection scheme for optical interferometersElectronics Letters, 1982
- Fiber-optic sensing of pressure and temperatureApplied Optics, 1979
- Coupled-mode theory for guided-wave opticsIEEE Journal of Quantum Electronics, 1973