Investigation of surface topography using the backscattered electron signal
- 1 January 1987
- Vol. 9 (3) , 109-116
- https://doi.org/10.1002/sca.4950090304
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- Signal of backscattered electrons at edges and surface steps in dependence on surface tilt and take-off directionScanning, 1986
- Reconstruction of true surface‐topographies in scanning electron microscopes using backscattered electronsScanning, 1985
- Detector strategy for secondary and backscattered electrons using multiple detector systemsScanning, 1985
- Alignment Signals from Symmetrical Silicon Marks for Electron Beam LithographyJournal of the Electrochemical Society, 1983
- Electron backscattering from thin filmsJournal of Applied Physics, 1982
- Alignment signals from silicon tapered steps for electron beam lithographyJournal of Applied Physics, 1982
- The measurement of atomic number and composition in an SEM using backscattered detectorsJournal of Microscopy, 1981
- Registration Mark Detection for Electron-Beam Lithography—EL1 SystemIBM Journal of Research and Development, 1980
- An automatic topographical surface reconstruction in the SEMScanning, 1979
- Simple Theory Concerning the Reflection of Electrons from SolidsJournal of Applied Physics, 1960