Design features of a high-intensity, cesium-sputter/plasma-sputter negative ion sourcea)
- 1 June 1994
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (6) , 2006-2011
- https://doi.org/10.1063/1.1144804
Abstract
A versatile, high‐intensity, negative ion source has been designed and is now under construction which can be operated in either the cesium‐sputter or plasma‐sputter mode. The cesium‐sputter mode can be effected by installation of a newly designed conical‐geometry cesium‐surface ionizer; for operation in the plasma‐sputter mode, the surface ionizer is removed and either a hot filament or rf antenna plasma‐discharge igniter is installed. A multicusp magnetic field is specifically provided confining the plasma in the radial direction when the plasma‐sputter mode is selected. This arrangement allows comparison of the two modes of operation. Brief descriptions of the design features, ion optics, and anticipated performances of the two source geometries will be presented in this report.Keywords
This publication has 24 references indexed in Scilit:
- Selection and design of ion sources for use at the Holifield radioactive ion beam facilitya)Review of Scientific Instruments, 1994
- The Oak Ridge radioactive ion beam facilityNuclear Physics A, 1993
- A scaled sigmund theory model for determining sputter ratiosRadiation Effects and Defects in Solids, 1993
- Measurement of negative-ion-production efficiencies and development of a dc operation sputter-type negative ion sourceReview of Scientific Instruments, 1992
- A simple, high efficiency, negative surface ionization sourceReview of Scientific Instruments, 1992
- Plasma sputter negative ion source with ECR discharge (invited)Review of Scientific Instruments, 1992
- Semi-empimcal mathematical relationships for electropositive adsorbate induced work function changesSurface Science, 1986
- A versatile high intensity negative ion sourceNuclear Instruments and Methods in Physics Research, 1983
- Secondary-ion emission probability in sputteringPhysical Review B, 1979
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969