Hydrogen ion implantation profiles as determined by SIMS
- 1 March 1978
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 149 (1-3) , 529-533
- https://doi.org/10.1016/0029-554x(78)90921-7
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Inelastic stopping of medium energy light ions in siliconRadiation Effects, 1977
- Abstract: Interaction of ion beams with solidsJournal of Vacuum Science and Technology, 1975
- Energy density and time constant of heavy-ion-induced elastic-collision spikes in solidsApplied Physics Letters, 1974
- Nonlinear effects in heavy-ion sputteringJournal of Applied Physics, 1974
- ION IMPLANTATION DEPTH DISTRIBUTIONS: ENERGY DEPOSITION INTO ATOMIC PROCESSES AND ION LOCATIONSApplied Physics Letters, 1970