Etching of Silicon Carbide Materials at Elevated Temperatures in a Nitrogen‐Based Gas
- 1 February 1991
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 74 (2) , 457-459
- https://doi.org/10.1111/j.1151-2916.1991.tb06910.x
Abstract
No abstract availableKeywords
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