Untersuchungen an Ta2N-oxid-schichten
- 1 June 1973
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 16 (3) , 359-367
- https://doi.org/10.1016/0040-6090(73)90089-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A very pure thin film tantalum phaseThin Solid Films, 1971
- Properties of Anodic Films Formed on Reactively Sputtered TantalumJournal of the Electrochemical Society, 1966
- Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum FilmsJournal of Applied Physics, 1964