XPS study on the early stages of oxidation of Si(100) by atomic oxygen
- 3 November 1989
- journal article
- Published by Elsevier in Surface Science
- Vol. 222 (2-3) , 530-554
- https://doi.org/10.1016/0039-6028(89)90377-4
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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