Composite ceramic powders obtained by laser induced reactions of silane and amines

Abstract
Ultrafine, ternary (Si/C/N) ceramic powders have been produced after CO2 laser initiated reactions between silane and mono- or dimethylamine. Various spectroscopic diagnostics and chemical analyses, including ir spectrophotometry, x-ray photoelectron spectroscopy, and x-ray diffraction analysis have been employed to correlate the parameters involved in gas-phase reactions and the powder final composition.