Intrinsic stress measurements as a quantitative measure of the growth morphology transition in a-Si:H
- 1 July 1984
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 66 (1) , 87-92
- https://doi.org/10.1016/0022-3093(84)90303-x
Abstract
No abstract availableKeywords
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