Thin yttrium and rare earth oxide films produced by plasma enhanced CVD of novel organometallic ?-complexes
- 1 December 1990
- journal article
- surfaces and-multilayers
- Published by Springer Nature in Applied Physics A
- Vol. 51 (6) , 520-525
- https://doi.org/10.1007/bf00324736
Abstract
No abstract availableKeywords
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