Automated system for the characterization of high resistivity semiconductors by the van der Pauw method
- 1 July 1981
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 52 (7) , 1047-1050
- https://doi.org/10.1063/1.1136732
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Measurement of High Resistivity Semiconductors Using the van der Pauw MethodReview of Scientific Instruments, 1973