Structural and tribological characterization of multilayer ta-C films prepared by filtered cathodic vacuum arc with substrate pulse biasing
- 5 October 2000
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 132 (2-3) , 228-232
- https://doi.org/10.1016/s0257-8972(00)00848-3
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during depositionSurface and Coatings Technology, 1998
- Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arcSurface and Coatings Technology, 1998
- Multilayers of amorphous carbon prepared by cathodic arc depositionSurface and Coatings Technology, 1997
- Tribological Properties of Tetrahedral Carbon Films Deposited by Filtered Cathodic Vacuum Arc TechniqueMRS Proceedings, 1996
- Simulation of plasma flow in toroidal solenoid filtersIEEE Transactions on Plasma Science, 1996
- Effect of vacuum arc deposition parameters on the properties of amorphous carbon thin filmsSurface and Coatings Technology, 1994
- Tribochemistry of diamond-like carbon coatings in various environmentsSurface and Coatings Technology, 1994
- Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam sourceApplied Physics Letters, 1994
- Deposition mechanisms for promoting sp3 bonding in diamond-like carbonDiamond and Related Materials, 1993
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992